Plasma gas processing

Adhesive bonding and miscellaneous chemical manufacture – Plaster board making apparatus – With edge treatment means

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Details

118723E, 118723MW, 438726, 438729, 427575, 216 69, 216 71, 42218629, C23F 102, C23C 1600, H05H 130

Patent

active

061267791

ABSTRACT:
A plasma enhanced gas reactor including a reaction chamber having a pair of field-enhancing electrodes each of which has an axial passage through it by one of which a reactant gas is admitted to the reaction chamber, and by the other of which reaction products are removed from the reaction chamber.

REFERENCES:
patent: 3954954 (1976-05-01), Davis et al.
patent: 4876983 (1989-10-01), Fukuda et al.
patent: 5418430 (1995-05-01), Bayliss
patent: 5503807 (1996-04-01), Griffiths et al.

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