Plasma etching electrode

Details Plasma etching electrode Plasma etching electrode

1997-06-26

1999-11-30

Breneman, Bruce

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118723E, C23F 102, C23C 1600

Patent

active

059935979

ABSTRACT:
The present invention provides:

REFERENCES:
patent: 5074456 (1991-12-01), Degner et al.
patent: 5569356 (1996-10-01), Lenz et al.
patent: 5888414 (1999-03-01), Collins et al.

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