Electric heating – Metal heating – By arc
Patent
1980-06-26
1981-12-08
Rubinson, Gene Z.
Electric heating
Metal heating
By arc
219121PD, 219121PE, 204192E, 204298, 156646, 250539, B23K 700
Patent
active
043049834
ABSTRACT:
A plasma etching device having a quartz cylinder surrounded by RF energized electrodes or coils, contains a slotted aluminum tube into which wafers for etching are supported and processed. Each of the slots of the aluminum tube is provided with a shield extending longitudinally of the slot to intercept optical radiation, including deleterious ultraviolet (UV) radiation, of the plasma from entering the tube while still permitting the active etchant particles to pass into the tube to act on the wafers.
REFERENCES:
patent: 1926473 (1933-09-01), Wood
patent: 3879597 (1975-04-01), Bersin et al.
patent: 4115184 (1978-09-01), Poulsen
patent: 4147564 (1979-04-01), Magee et al.
patent: 4151064 (1979-04-01), Kuehnle
patent: 4160690 (1979-07-01), Shibagaki et al.
Cohen Donald S.
Lazar Joseph D.
Morris Birgit E.
Paschall M.
RCA Corporation
LandOfFree
Plasma etching device and process does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Plasma etching device and process, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Plasma etching device and process will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-569438