Plasma etching apparatus and transporting device used in the sam

Details Plasma etching apparatus and transporting device used in the sam Plasma etching apparatus and transporting device used in the sam

1991-11-29

1993-05-18

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

156643, 20429835, H01L 21306, B44C 122

Patent

active

052117952

ABSTRACT:
A transporting device used in a plasma etching apparatus comprises a loading unit having a loading surface on which articles to be treated are loaded, and a moving mechanism for moving the loading unit. The loading unit is coated with an electrically conducting layer for moving electric charges accumulated on the loading surface due to plasma etching and preventing erosion of the loading unit.

REFERENCES:
patent: 4891087 (1990-01-01), Davis et al.

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