Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1994-04-15
1995-10-17
Nguyen, Nam
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
20429841, C23C 1424
Patent
active
054587549
ABSTRACT:
The present invention provides a plasma enhancement method and apparatus for electric arc vapor deposition. The plasma enhancement apparatus is positioned to act upon plasma generated from a plasma source before the plasma reaches a substrate to be coated by the plasma. The plasma enhancement apparatus includes a magnet disposed about a magnet axis and defining a first aperture, and a core member disposed about a core member axis and at least partially nested within the first aperture. The core member defines a second aperture, and the plasma enhancement apparatus is arranged and configured in such a manner that the evaporated cathode source material passes from the cathode source and through the second aperture toward the substrate to be coated by the evaporated cathode source material. The plasma is favorably conditioned as it passes through the plasma enhancement apparatus.
REFERENCES:
patent: 395963 (1989-01-01), Edison
patent: 526147 (1994-09-01), Edison
patent: 713863 (1902-11-01), Edison
patent: 767216 (1904-08-01), Edison
patent: 898346 (1908-09-01), Ferranti
patent: T904020 (1971-05-01), Lane
patent: 1064671 (1913-06-01), Simpson
patent: 1162149 (1915-11-01), Eckhardt
patent: 1506320 (1924-08-01), Northrup
patent: 1584728 (1926-05-01), Case
patent: 1624071 (1927-04-01), Richardson
patent: 1635217 (1927-07-01), Kirchman
patent: 1833640 (1931-11-01), Fruth
patent: 1887577 (1932-11-01), Bridger
patent: 1982012 (1934-11-01), Mingard
patent: 2103623 (1937-12-01), Kott
patent: 2146025 (1939-02-01), Penning
patent: 2148045 (1939-02-01), Burkhardt et al.
patent: 2157478 (1939-05-01), Burkhardt et al.
patent: 2157498 (1939-05-01), Reinecke et al.
patent: 2164595 (1939-07-01), Siebertz
patent: 2200909 (1940-05-01), Berghaus et al.
patent: 2217448 (1940-10-01), Muller
patent: 2251510 (1941-08-01), Berghaus et al.
patent: 2257411 (1941-09-01), Berghaus et al.
patent: 2307749 (1943-01-01), Slepian
patent: 2843542 (1958-07-01), Callahan
patent: 2884894 (1959-05-01), Ruppert et al.
patent: 2900548 (1959-08-01), Bostick et al.
patent: 2909697 (1959-10-01), Bernas et al.
patent: 2916409 (1959-12-01), Bucek
patent: 2920234 (1960-01-01), Luce
patent: 2922869 (1960-01-01), Giannini et al.
patent: 2932588 (1960-04-01), Frank
patent: 2967927 (1961-01-01), Weismann
patent: 2972695 (1961-02-01), Wroe
patent: 2982845 (1961-05-01), Yenni et al.
patent: 3007072 (1961-10-01), McGinn et al.
patent: 3010009 (1961-11-01), Ducati
patent: 3016447 (1962-01-01), Gage et al.
patent: 3055591 (1962-09-01), Shepard
patent: 3071491 (1963-01-01), Horn et al.
patent: 3075066 (1963-01-01), Yenni et al.
patent: 3085317 (1963-04-01), Stackhouse
patent: 3097154 (1963-07-01), Eck et al.
patent: 3131276 (1964-04-01), Watson
patent: 3139509 (1964-06-01), Browning
patent: 3141826 (1964-07-01), Friedrichs et al.
patent: 3141989 (1964-07-01), Jones et al.
patent: 3158805 (1964-11-01), Kalbfell
patent: 3192892 (1965-07-01), Hanson et al.
patent: 3202862 (1965-08-01), Paley
patent: 3205338 (1965-09-01), Sunnen
patent: 3210263 (1965-10-01), Jones
patent: 3239368 (1966-03-01), Goodman
patent: 3243493 (1966-03-01), Bunshah et al.
patent: 3246070 (1966-04-01), Wooding
patent: 3248513 (1966-04-01), Sunnen
patent: 3283205 (1966-11-01), de Bolt
patent: 3294583 (1966-12-01), Fedows-Fedotowsky
patent: 3294669 (1966-12-01), Theuerer
patent: 3325392 (1967-06-01), Rummel
patent: 3328200 (1967-06-01), Neugebauer
patent: 3329601 (1967-07-01), Mattox
patent: 3351543 (1967-11-01), Vanderslice
patent: 3369989 (1968-02-01), Kay et al.
patent: 3404084 (1968-10-01), Hamilton
patent: 3408283 (1968-10-01), Chopra et al.
patent: 3420767 (1969-01-01), Carlson
patent: 3428546 (1969-02-01), Baum et al.
patent: 3437734 (1969-04-01), Roman et al.
patent: 3446932 (1969-05-01), Belopitov
patent: 3457156 (1969-07-01), Fisher
patent: 3472751 (1969-10-01), King
patent: 3474279 (1969-10-01), Kemeny et al.
patent: 3475161 (1969-10-01), Ramirez
patent: 3475315 (1969-10-01), Moseson
patent: 3476586 (1969-11-01), Valtchev et al.
patent: 3476971 (1969-11-01), Ligenza et al.
patent: 3482133 (1969-12-01), Dugdale et al.
patent: 3492152 (1970-01-01), Cariou et al.
patent: 3492153 (1970-01-01), Ervin, Jr.
patent: 3501393 (1970-03-01), Wehner et al.
patent: 3528387 (1970-09-01), Hamilton
patent: 3546091 (1970-12-01), Rossner et al.
patent: 3555238 (1971-01-01), Fay et al.
patent: 3556048 (1970-01-01), Paine
patent: 3562141 (1971-02-01), Morley
patent: 3573098 (1971-03-01), Bieber et al.
patent: 3573185 (1971-03-01), Jennings et al.
patent: 3583361 (1971-06-01), Laudel, Jr.
patent: 3604970 (1971-09-01), Culbertson
patent: 3629095 (1971-12-01), Jackson et al.
patent: 3640689 (1972-02-01), Glaski et al.
patent: 3645710 (1972-02-01), Plumat et al.
patent: 3656995 (1972-04-01), Reedy, Jr.
patent: 3661758 (1972-05-01), Jackson et al.
patent: 3669871 (1972-06-01), Elmgren et al.
patent: 3684585 (1972-08-01), Stroup et al.
patent: 3691053 (1972-09-01), James et al.
patent: 3699034 (1972-10-01), Lins et al.
patent: 3708325 (1973-01-01), Kurtz et al.
patent: 3709809 (1973-01-01), Wright et al.
patent: 3715625 (1973-02-01), Ehlers
patent: 3719582 (1972-03-01), Hansen et al.
patent: 3721577 (1973-03-01), Woerner
patent: 3756193 (1973-09-01), Carmichael et al.
patent: 3769008 (1973-10-01), Borok et al.
patent: 3776762 (1973-12-01), Bernath
patent: 3783231 (1974-01-01), Sablev et al.
patent: 3784401 (1974-01-01), Reedy, Jr.
patent: 3787223 (1974-01-01), Reedy, Jr.
patent: 3793179 (1974-02-01), Sablev et al.
patent: 3799862 (1974-03-01), Krutenat
patent: 3832514 (1974-08-01), Antonov
patent: 3836451 (1974-09-01), Snaper
patent: 3854984 (1974-12-01), Schadler et al.
patent: 3874900 (1975-04-01), Post et al.
patent: 3882579 (1975-05-01), Peacock
patent: 3891884 (1975-06-01), Tisdale
patent: 3895923 (1975-07-01), Wakefield
patent: 3900592 (1975-08-01), Kennedy et al.
patent: 3901784 (1975-08-01), Quinn et al.
patent: 3904505 (1975-09-01), Aisenberg
patent: 3908183 (1975-09-01), Ennis, Jr.
patent: 3912826 (1975-10-01), Kennedy
patent: 3913520 (1975-10-01), Berg et al.
patent: 3915757 (1975-10-01), Engel
patent: 3917992 (1975-11-01), Volkov et al.
patent: 3922214 (1975-11-01), Van Cakenberghe
patent: 3922405 (1975-11-01), Komatsu et al.
patent: 3925177 (1975-12-01), Kofoid
patent: 3928159 (1975-12-01), Tadokoro et al.
patent: 3935377 (1976-01-01), Gamble
patent: 3948211 (1976-04-01), Griboedov et al.
patent: 3959557 (1976-05-01), Berry
patent: 3961103 (1976-06-01), Aisenberg
patent: 3962988 (1976-06-01), Murayama et al.
patent: 3964937 (1976-06-01), Post et al.
patent: 3974059 (1976-08-01), Murayama
patent: 3988515 (1976-10-01), Hashimoto et al.
patent: 3988955 (1976-11-01), Engel et al.
patent: 3990390 (1976-11-01), Plyshevsky et al.
patent: 4001461 (1977-01-01), Bykhovsky
patent: 4016013 (1977-04-01), Bitzer et al.
patent: 4016389 (1977-04-01), White
patent: 4018631 (1977-04-01), Hale
patent: 4019873 (1977-04-01), Reiter
patent: 4027367 (1977-06-01), Rondeau
patent: 4052530 (1977-10-01), Fonzi
patent: 4054426 (1977-10-01), White
patent: 4057476 (1977-11-01), Krikorian et al.
patent: 4066821 (1978-01-01), Cook et al.
patent: 4075376 (1978-02-01), Jaeger
patent: 4078163 (1978-03-01), Tanaka et al.
patent: 4082636 (1978-04-01), Takagi
patent: 4098956 (1978-07-01), Blickensderfer et al.
patent: 4103042 (1978-07-01), Winters
patent: 4104096 (1978-08-01), Gass et al.
patent: 4109157 (1978-08-01), Tanaka et al.
patent: 4112148 (1978-09-01), Fonzi
patent: 4151325 (1979-04-01), Welch
patent: 4152478 (1979-05-01), Takagi
patent: 4153483 (1979-05-01), Holzl
patent: 4153529 (1979-05-01), Little et al.
patent: 4162954 (1979-07-01), Morrison, Jr.
patent: 4169913 (1979-10-01), Kobayashi et al.
patent: 4170662 (1979-10-01), Weiss et al.
patent: 4175029 (1979-11-01), Kovalsky et al.
patent: 4180450 (1979-12-01), Morrison, Jr.
patent: 4194930 (1980-03-01), Tanaka et al.
patent: 4197175 (1980-04-01), Moll et al.
patent: 4208543 (1980-06-01), Boyle et al.
patent: 4226697 (1980-10-01), Antonov et al.
patent: 4238525 (1980-12-01), Aichert et al.
patent: 4239611 (1990-12-01), Morrison, Jr.
patent: 42657
Coll Bernard F.
Sathrum Paul E.
Multi-Arc Scientific Coatings
Nguyen Nam
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