Plasma-enhanced CVD of oxide superconducting films by utilizing

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k

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505727, 505734, 427 62, 427595, 427576, 427598, 427585, B05D 306, B05D 314, B05D 512

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051622963

ABSTRACT:
A method for forming a superconducting oxide material including introducing oxygen or an oxidizing gas and a reactive gas or reactive minute particles into a plasma generating chamber; applying a magnetic field to the plasma generating chamber; supplying microwaves to the plasma generating chamber where the direction of the magnetic field and the propagation direction of the microwave are parallel such that the oxygen or the oxidizing gas and the reactive gas or reactive minute particles are converting into plasma; and the formation of a superconducting oxide material on a film forming surface positioned in the plasma generating chamber during application of the magnetic field.

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Ono et al., "Ultrafine BaPb.sub.1-x Bi.sub.x O.sub.3 Powders Prepared by the Spray-ICP Technique", Plasma Chemistry and Plasma Processing, vol. 7, No. 2, 1987, pp. 208-209.
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Bednorz et al., "Possible High Tc Superconductivity in the Ba-La-Cu-O System" Z. Phys. B-Condensed Matter 64 pp. 189-193 (1986).

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