Electric lamp or space discharge component or device manufacturi – Process – Electrode making
Reexamination Certificate
2004-02-23
2009-02-17
Patel, Nimeshkumar D. (Department: 2879)
Electric lamp or space discharge component or device manufacturi
Process
Electrode making
C313S582000
Reexamination Certificate
active
07491107
ABSTRACT:
The present invention provides a method of manufacturing a PDP that prevents a defect from occurring in a structure of the PDP; and also suppresses retroflexion, exfoliation, and the like, of the structure. In photolithography, exposure is performed twice with a first and a second photomasks, each having a different aperture width, but the same exposure pattern. The amount of exposure is different between first exposure region (A′) through the first photomask; and second exposure region (B′) through the second photomask.
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McDermott Will & Emery LLP
Panasonic Corporation
Patel Nimeshkumar D.
Raabe Christopher M
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