Radiant energy – Ion generation – Field ionization type
Patent
1996-11-26
1998-06-02
Nguyen, Kiet T.
Radiant energy
Ion generation
Field ionization type
31511141, H01J 2720
Patent
active
057604053
ABSTRACT:
An ion source for generating an ion beam of primary ions is disclosed that includes a plasma chamber and magnets positioned therein for separating the primary ions of the plasma from secondary ions within the plasma. An electrode assembly extracts the primary ions through an extractor outlet port of the plasma chamber to form an ion beam, which preferentially is shaped as a ribbon beam. The primary ions are accelerated in the form of a ribbon beam toward the target workpiece for doping the device. The magnets are oriented in the chamber to produce a uniform current density of primary ions parallel to the elongated axis of the ribbon beam.
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Blake Julian G.
King Michael C.
Rose Peter H.
Eaton Corporation
Engellenner Thomas J.
Kurisko Mark A.
Nguyen Kiet T.
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