Plasma asher with microwave trap

Details Plasma asher with microwave trap Plasma asher with microwave trap

1994-02-25

1996-03-12

Dang, Thi

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

315 39, 31511121, 216 69, H05H 100

Patent

active

054983088

ABSTRACT:
A plasma asher which obviates microwave leakage and attendant problems by providing a microwave trap proximate the opening through which the plasma tube exits the microwave cavity.

REFERENCES:
patent: Re32664 (1988-05-01), Osepchuk et al.
patent: 3584177 (1971-06-01), Bucksbaum
patent: 3819900 (1974-06-01), Ironfield
patent: 3872349 (1975-03-01), Spero et al.
patent: 3882352 (1975-05-01), Osepchuk et al.
patent: 4137441 (1979-01-01), Bucksbaum
patent: 4137442 (1979-01-01), Tateda
patent: 4207452 (1980-06-01), Arai
patent: 4511779 (1985-04-01), Bucksbaum et al.
patent: 4776923 (1988-10-01), Spencer et al.
patent: 5063329 (1991-11-01), Okamoto
patent: 5082517 (1992-01-01), Moslehi
patent: 5262610 (1993-11-01), Huang et al.
"Characterization of a Novel Microwave Stripper", by F. Pasierb, A. Ghanbari, M. S. Ameen, and R. S. Heinrich, 8257a Journal of Vacuum Science & Technology, A 10(4), Jul./Aug. 1992, No. 4, Pt. 1, pp. 1096-1099.

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