Radiant energy – Ionic separation or analysis
Patent
1991-03-25
1992-07-14
Berman, Jack I.
Radiant energy
Ionic separation or analysis
250288, H01J 4912
Patent
active
051305372
ABSTRACT:
A plasma analyzer for trace element analysis has a gas supply system comprising a plurality of gas sources, an electromagnetic valve provided on a line connecting each gas source to a plasma generating space, a buffer tank provided after the electromagnetic valve on the line, and a flow regulating flowmeter provided after the buffer tank on the line. Each electromagnetic valves is controlled for on-off operation and the corresponding buffer tank suppresses the sudden change of the flow rate of the corresponding gas, so that the composition of the gas supplied to the plasma generating space changes gradually in spite of the simple on-off operation of the electromagnetic valves. Thus, the fluctuation and extinction of the plasma attributable to the sudden change of the composition of the gas supplied to the plasma generating space can be effectively prevented.
REFERENCES:
patent: 3943363 (1976-03-01), Amblard
patent: 4902099 (1990-02-01), Okamoto et al.
patent: 4948962 (1990-08-01), Mitsui et al.
patent: 4963735 (1990-10-01), Okamoto et al.
Iino Takashi
Kitagawa Masatoshi
Okamoto Yukio
Shimura Satoshi
Tsukada Masamichi
Berman Jack I.
Beyer James E.
Hitachi , Ltd.
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