Plasma addressed liquid crystal display with etched glass spacer

Electric lamp and discharge devices – With gas or vapor – Three or more electrode discharge device

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313584, 313585, 345 60, H01J 1749

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active

058049207

ABSTRACT:
A flat display device, preferably of the PALC type, in which the plasma channels are formed by etching laterally-spaced slots in a spacer plate, attaching a thin dielectric sheet over the etched spacer plate, and bonding the etched spacer plate to a transparent substrate such that each channel is formed by the portion of the substrate between flanking walls formed by the etched slots in the spacer plate, adjacent flanking walls in the spacer plate, and the overlying portion of the thin dielectric sheet. By positioning the flanking walls between channel electrode pairs, thus providing glass-to-glass interfaces, anodic bonding can be employed to assemble the three channel elements. Etching can be simplified by pre-attaching the unetched channel plate to the substrate or thin dielectric cover sheet with an intervening etch stop, and etching in situ using the etch stop to prevent etching of the substrate or thin dielectric cover sheet. In a modification, the thin dielectric cover sheet as a separate element is substituted by depositing a continuous layer or multi-layers including an etch stop on the unetched spacer plate so that, following the etching, the deposited layer or multi-layer remains as the thin channel cover.

REFERENCES:
patent: 4896149 (1990-01-01), Buzak et al.
patent: 5077553 (1991-12-01), Buzak
patent: 5272472 (1993-12-01), Buzak
patent: 5276384 (1994-01-01), Martin
patent: 5395481 (1995-03-01), McCarthy
patent: 5440201 (1995-08-01), Martin et al.
patent: 5453660 (1995-09-01), Martin et al.
patent: 5525862 (1996-06-01), Miyazaki
patent: 5619097 (1997-04-01), Jones
Buzak et al, "A 16-Inch Full Color Plasma Addressed Liquid Crystal Display", Digest of Tech. Papers, 1993 SID Int. Symp., Soc. for Info. Displ. pp. 883-886.

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