Liquid crystal cells – elements and systems – Particular excitation of liquid crystal – Plasma excitation
Patent
1995-03-29
1997-01-21
Sikes, William L.
Liquid crystal cells, elements and systems
Particular excitation of liquid crystal
Plasma excitation
345 60, 3151694, 365116, 313484, 349149, 349187, G02F 1133, G02F 11345, G02F 113, G09G 322
Patent
active
055964311
ABSTRACT:
A method for making an electrical device such as a PALC display device, and the electrical device or PALC device so made, in which a channel plate is provided with substantially vertical side walls, and the electrodes are formed by a self-aligning anisotropic plasma etching process which requires no photolithography. A similar process may be used to form a fanout region for individual contacting of channel electrodes. For improved contacting, preferably the fanout region is also channelled and an upstanding structure such as columns provided in the fanout channels so that the spaces between the columns and between the columns and the side walls are filled up with deposited metal that remains following the anisotropic etching process.
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"Thin Film Processes" edit. by J. L. Vossen and W. Kern, published 1978 by Academic Press, Ch. V-2, pp. 497-556.
Buzak et al., "A 16-Inch Full Color Plasma Addressed Liquid Crystal Display", Digest of Tech. Papers, 1993 SID Int. Symp., Soc. for Info. Disp. pp. 883-886.
Bongaerts Petrus F. G.
Bruinink Jacob
Burgmans Adrianus L. J.
Khan Babar A.
Kuijk Karel E.
Fox John C.
Philips Electronics North America Corp.
Sikes William L.
Trice Ron
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