Plasma activated deposition of an insulating material on the int

Details Plasma activated deposition of an insulating material on the int Plasma activated deposition of an insulating material on the int

1987-09-24

1989-10-31

Paschall, M. H.

Electric heating

Metal heating

By arc

219 1055F, 219 1055M, 21912147, 427 12, 427 34, 118623, B23K 900

Patent

active

048779385

ABSTRACT:
In the internal coating of a tube of an electrically insulating material by a second electrically insulating material by reactive deposition of the second electrically insulating material from a gas mixture which is passed through the tube, the desposition is activated by a plasma which is produced by microwaves and is reciprocated in the tube. A method with low energy consumption and a device of a simple construction are made possible in that the plasma is excited by TE 011 resonance in a cylindrical resonator.

REFERENCES:
patent: 3461261 (1969-08-01), Lewis et al.
patent: 3560694 (1971-02-01), White
patent: 3597567 (1971-08-01), Johnson
patent: 4101411 (1978-07-01), Suzuki et al.
patent: 4292063 (1981-09-01), Abe
patent: 4423303 (1983-12-01), Hirose et al.
patent: 4543465 (1985-09-01), Sakudo et al.

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