Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate
2006-07-25
2006-07-25
Hassanzadeh, Parviz (Department: 1763)
Coating apparatus
Gas or vapor deposition
Work support
C156S345550
Reexamination Certificate
active
07081166
ABSTRACT:
A planet system workpiece support for a vacuum treatment apparatus includes a sun system rotatable in the vacuum treatment apparatus about a sun system axle to be coupled to a drive. At least one planet system is rotatable on planet axle and is supported on the sun system. The planet system has a driving coupling for driving the planet system and the support has at least one moon system supported on the planet system and rotatable about a moon axle with a driving connection to the sun system. At least one workpiece is received on the moon system and the driving connection is established, at least during operation, uninterruptedly between sun system and moon system.
REFERENCES:
patent: 3598083 (1971-08-01), Dort et al.
patent: 3853091 (1974-12-01), Christensen et al.
patent: 3926421 (1975-12-01), Reiger et al.
patent: 4087239 (1978-05-01), Cline et al.
patent: 4284033 (1981-08-01), del Rio
patent: 5029555 (1991-07-01), Dietrich et al.
patent: 5902407 (1999-05-01), deBoer et al.
patent: 6620254 (2003-09-01), Zaech et al.
EPO—Patent Abstracts of Japan—Publ. No. 01133318—Publ. Date May 25, 1989.
EPO—Patent Abstracts of Japan—Publ. No. 01133320—Publ. Date May 25, 1989.
EPO—Patent Abstracts of Japan—Publ. No. 01309967—Publ. Date Dec. 14, 1989.
Kunz Anton
Zaech Martin
Hassanzadeh Parviz
MacArthur Sylvia R.
Notaro $ Michalos PC
Unaxis Balzers Aktiengesellschaft
LandOfFree
Planetary system workpiece support and method for surface... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Planetary system workpiece support and method for surface..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Planetary system workpiece support and method for surface... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3608791