Photocopying – Projection printing and copying cameras – Focus or magnification control
Patent
1998-12-04
2000-12-19
Adams, Russell
Photocopying
Projection printing and copying cameras
Focus or magnification control
355 53, 355 56, 355 71, 356399, 356400, G03B 2752, G01B 1100
Patent
active
061633690
ABSTRACT:
The position or the inclination of a substrate surface is detected at a high accuracy and a high speed, and corrected. When moving the substrate in a direction substantially at right angles to an optical axis of a projection optical system and feeding an area on the substrate into an image space of the projection optical system, at least one of the position and inclination in the optical axis direction of the substrate is detected, to bring that area into focus with the focal plane of the projection optical system. One of a first mode of conducting the measurement during travel of the substrate and a second mode of performing the measurement in a state in which that area has substantially been positioned in the image space is selected.
REFERENCES:
patent: 4962423 (1990-10-01), Yamada et al.
patent: 5323016 (1994-06-01), Yamada et al.
patent: 5361122 (1994-11-01), Kataoka et al.
patent: 5777722 (1998-07-01), Miyazaki et al.
patent: 5801835 (1998-09-01), Mitzutani et al.
patent: 5825043 (1998-10-01), Suwa
patent: 5969800 (1999-10-01), Makinouchi
patent: 6018384 (2000-01-01), Ota
Kawahara Atsushi
Yamada Yuichi
Adams Russell
Brown Khaled
Canon Kabushiki Kaisha
LandOfFree
Plane position detecting method and exposing method and exposure does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Plane position detecting method and exposing method and exposure, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Plane position detecting method and exposing method and exposure will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-275247