Plane light source unit and radiant heating furnace including sa

Details Plane light source unit and radiant heating furnace including sa Plane light source unit and radiant heating furnace including sa

1982-11-03

1985-09-24

Envall, Jr., Roy N.

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

219405, 219354, H05B 100, F27D 1100

Patent

active

045434727

ABSTRACT:
Disclosed herein is a plane light source unit comprising a plurality of lamps disposed closely with each other in proximity to a mirror with the longitudinal axes of the lamps extending parallelly in a plane. Each of the lamps comprises an elongated sealed tubular body and a filament formed of alternating non-luminous portions and luminous portions and provided within the tubular body along the longitudinal axis of the tubular body. A radiant heating furnace comprising the above plane light source unit and a cooling system therefor is also disclosed. The plane light source unit and a radiant heating furnace incorporating the same light source unit can irradiate light onto a region of a large area with a uniform irradiation energy density. They are suitable for heat treatment of semiconductor wafers.

REFERENCES:
patent: 2677748 (1954-05-01), Naylor
patent: 2678958 (1954-05-01), Hintenberger
patent: 2981819 (1961-04-01), Gregory
patent: 3239651 (1966-03-01), Silberman
patent: 3240915 (1966-03-01), Carter
patent: 3295007 (1966-12-01), Young
patent: 3371187 (1968-02-01), Volker
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patent: 4052637 (1977-10-01), Op de Beeck
patent: 4101759 (1978-07-01), Anthony
patent: 4272698 (1981-01-01), Oyama
patent: 4414484 (1983-11-01), Notelteirs

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