Abrading – Abrading process – Abradant supplying
Reexamination Certificate
2007-05-01
2007-05-01
Rachuba, M. (Department: 3723)
Abrading
Abrading process
Abradant supplying
C451S287000
Reexamination Certificate
active
10828403
ABSTRACT:
Machines with solution dispensers and methods of using such machines for chemical-mechanical planarization and/or electrochemical-mechanical planarization/deposition of microelectronic workpieces. One embodiment of such a machine includes a table having a support surface, a processing pad on the support surface, and a carrier assembly having a head configured to hold a microelectronic workpiece. The carrier assembly can further include a drive assembly that manipulates the head. The machine can also include a solution dispenser separate from the head. The solution dispenser can include a support extending over the pad and a fluid discharge unit or distributor carried by the support. The fluid discharge unit is configured to discharge a planarizing solution onto a plurality of separate locations across the pad.
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Micro)n Technology, Inc.
Perkins Coie LLP
Rachuba M.
LandOfFree
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