Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate
2005-07-26
2005-07-26
Rosenberger, Richard A. (Department: 2877)
Optics: measuring and testing
Dimension
Thickness
Reexamination Certificate
active
06922253
ABSTRACT:
A system for controlling a mechanical or chemical-mechanical planarizing machine comprises a light system, a sensor, and a computer. The light system can have at least a first emitter that generates a first light pulse having a first color and a second emitter that generates a second light pulse having a second color different than the first color. The first and second light pulses reflect from a microelectronic substrate in a manner that creates a first return light pulse corresponding to a reflectance of the first light pulse and a second return light pulse corresponding to a reflectance of the second light pulse. The sensor receives the first return light pulse and the second return light pulse, and the sensor generates a first measured intensity of the first return light pulse and a second measured intensity of the second return light pulse. The computer has a database and a computer readable medium. The database contains a plurality of sets of reference reflectances in which each set has a first reference component defined by a reflectance intensity of the first light pulse and a second reference component defined by a reflectance intensity of the second light pulse from a selected surface level in a layer of material on the microelectronic substrate. The computer readable medium contain a computer readable program that causes the computer to control a parameter of the planarizing machine when the first and second measured intensities correspond to the first and second reference components of a selected reference reflectance set.
REFERENCES:
patent: 4145703 (1979-03-01), Blanchard et al.
patent: 4200395 (1980-04-01), Smith et al.
patent: 4203799 (1980-05-01), Sugawara et al.
patent: 4305760 (1981-12-01), Trudel
patent: 4358338 (1982-11-01), Downey et al.
patent: 4367044 (1983-01-01), Booth, Jr. et al.
patent: 4377028 (1983-03-01), Imahashi
patent: 4422764 (1983-12-01), Eastman
patent: 4498345 (1985-02-01), Dyer et al.
patent: 4501258 (1985-02-01), Dyer et al.
patent: 4502459 (1985-03-01), Dyer
patent: 4640002 (1987-02-01), Phillips et al.
patent: 4660980 (1987-04-01), Takabayashi et al.
patent: 4717255 (1988-01-01), Ulbers
patent: 4755058 (1988-07-01), Shaffer
patent: 4879258 (1989-11-01), Fisher
patent: 4946550 (1990-08-01), Van Laarhoven
patent: 4971021 (1990-11-01), Kubotera et al.
patent: 5020283 (1991-06-01), Tuttle
patent: 5036015 (1991-07-01), Sandhu et al.
patent: 5069002 (1991-12-01), Sandhu et al.
patent: 5081796 (1992-01-01), Schultz
patent: 5163334 (1992-11-01), Li et al.
patent: 5196353 (1993-03-01), Sandhu et al.
patent: 5220405 (1993-06-01), Barbee et al.
patent: 5222329 (1993-06-01), Yu
patent: 5232875 (1993-08-01), Tuttle et al.
patent: 5240552 (1993-08-01), Yu et al.
patent: 5244534 (1993-09-01), Yu et al.
patent: RE34425 (1993-11-01), Schultz
patent: 5314843 (1994-05-01), Yu et al.
patent: 5324381 (1994-06-01), Nishiguchi
patent: 5369488 (1994-11-01), Morokuma
patent: 5393624 (1995-02-01), Ushijima
patent: 5413941 (1995-05-01), Koos et al.
patent: 5433649 (1995-07-01), Nishida
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5439551 (1995-08-01), Meikle et al.
patent: 5449314 (1995-09-01), Meikle et al.
patent: 5461007 (1995-10-01), Kobayashi
patent: 5465154 (1995-11-01), Levy
patent: 5486129 (1996-01-01), Sandhu et al.
patent: 5514245 (1996-05-01), Doan et al.
patent: 5540810 (1996-07-01), Sandhu et al.
patent: 5573442 (1996-11-01), Morita et al.
patent: 5609718 (1997-03-01), Meikle
patent: 5616069 (1997-04-01), Walker et al.
patent: 5618381 (1997-04-01), Doan et al.
patent: 5618447 (1997-04-01), Sandhu
patent: 5624303 (1997-04-01), Robinson
patent: 5632666 (1997-05-01), Peratello et al.
patent: 5643044 (1997-07-01), Lund
patent: 5643048 (1997-07-01), Iyer
patent: 5645471 (1997-07-01), Strecker
patent: 5645682 (1997-07-01), Skrovan
patent: 5650619 (1997-07-01), Hudson
patent: 5655951 (1997-08-01), Meikle et al.
patent: 5658183 (1997-08-01), Sandhu et al.
patent: 5658190 (1997-08-01), Wright et al.
patent: 5663797 (1997-09-01), Sandhu
patent: 5667424 (1997-09-01), Pan
patent: 5668061 (1997-09-01), Herko et al.
patent: 5679065 (1997-10-01), Henderson
patent: 5681204 (1997-10-01), Kawaguchi et al.
patent: 5681423 (1997-10-01), Sandhu et al.
patent: 5690540 (1997-11-01), Elliott et al.
patent: 5698455 (1997-12-01), Meikle et al.
patent: 5700180 (1997-12-01), Sandhu et al.
patent: 5702292 (1997-12-01), Brunelli et al.
patent: 5725417 (1998-03-01), Robinson
patent: 5730642 (1998-03-01), Sandhu et al.
patent: 5736427 (1998-04-01), Henderson
patent: 5738562 (1998-04-01), Doan et al.
patent: 5738567 (1998-04-01), Manzonie et al.
patent: 5747386 (1998-05-01), Moore
patent: 5777739 (1998-07-01), Sandhu et al.
patent: 5779522 (1998-07-01), Walker et al.
patent: 5782675 (1998-07-01), Southwick
patent: 5791969 (1998-08-01), Lund
patent: 5792709 (1998-08-01), Robinson et al.
patent: 5795218 (1998-08-01), Doan et al.
patent: 5795495 (1998-08-01), Meikle
patent: 5798302 (1998-08-01), Hudson et al.
patent: 5801066 (1998-09-01), Meikle
patent: 5823855 (1998-10-01), Robinson
patent: 5830806 (1998-11-01), Hudson et al.
patent: 5842909 (1998-12-01), Sandhu et al.
patent: 5851135 (1998-12-01), Sandhu et al.
patent: 5855804 (1999-01-01), Walker
patent: 5865665 (1999-02-01), Yueh
patent: 5868896 (1999-02-01), Robinson et al.
patent: 5871392 (1999-02-01), Meikle et al.
patent: 5879222 (1999-03-01), Robinson
patent: 5879226 (1999-03-01), Robinson
patent: 5882248 (1999-03-01), Wright et al.
patent: 5893754 (1999-04-01), Robinson et al.
patent: 5893796 (1999-04-01), Birang et al.
patent: 5894852 (1999-04-01), Gonzales et al.
patent: 5899792 (1999-05-01), Yagi
patent: 5910043 (1999-06-01), Manzonie et al.
patent: 5910846 (1999-06-01), Sandhu
patent: 5930699 (1999-07-01), Bhatia
patent: 5934973 (1999-08-01), Boucher et al.
patent: 5934974 (1999-08-01), Tzeng
patent: 5934980 (1999-08-01), Koos et al.
patent: 5936733 (1999-08-01), Sandhu et al.
patent: 5938801 (1999-08-01), Robinson
patent: 5949927 (1999-09-01), Tang
patent: 5954912 (1999-09-01), Moore
patent: 5972792 (1999-10-01), Hudson
patent: 5976000 (1999-11-01), Hudson
patent: 5980363 (1999-11-01), Meikle et al.
patent: 5981396 (1999-11-01), Robinson et al.
patent: 5989470 (1999-11-01), Doan et al.
patent: 5994224 (1999-11-01), Sandhu et al.
patent: 5997384 (1999-12-01), Blalock
patent: 6000996 (1999-12-01), Fujiwara
patent: 6006739 (1999-12-01), Akram et al.
patent: 6007408 (1999-12-01), Sandhu
patent: 6036586 (2000-03-01), Ward
patent: 6039633 (2000-03-01), Chopra
patent: 6040111 (2000-03-01), Karasawa et al.
patent: 6045439 (2000-04-01), Birang et al.
patent: 6046111 (2000-04-01), Robinson
patent: 6054015 (2000-04-01), Brunelli et al.
patent: 6057602 (2000-05-01), Hudson et al.
patent: 6068539 (2000-05-01), Bajaj et al.
patent: 6075606 (2000-06-01), Doan
patent: 6083085 (2000-07-01), Lankford
patent: 6102775 (2000-08-01), Ushio et al.
patent: 6106351 (2000-08-01), Raina et al.
patent: 6106662 (2000-08-01), Bibby, Jr. et al.
patent: 6108091 (2000-08-01), Pecen et al.
patent: 6108092 (2000-08-01), Sandhu
patent: 6110820 (2000-08-01), Sandhu et al.
patent: 6114706 (2000-09-01), Meikle et al.
patent: 6120354 (2000-09-01), Koos et al.
patent: 6124207 (2000-09-01), Robinson et al.
patent: 6139402 (2000-10-01), Moore
patent: 6143123 (2000-11-01), Robinson et al.
patent: 6146248 (2000-11-01), Jairath et al.
patent: 6152803 (2000-11-01), Boucher et al.
patent: 6179709 (2001-01-01), Redeker et al.
patent: 6184571 (2001-02-01), Moore
patent: 6186870 (2001-02-01), Wright et al.
patent: 6187681 (2001-02-01), Moore
patent: 6190234 (2001-02-01), Swedek et al.
patent: 6190494 (2001-02-01), Dow
patent: 6191037 (2001-02-01), Robinson et al.
patent: 6191864 (2001-02-01), Sandhu
patent: 6200901 (2001-03-01), Hudson et al.
patent: 6203407 (2001-03-01), Robinson
patent: 6203413 (2001-03-01), Skrovan
patent: 6206754 (2001-03-01), Moore
patent: 6206759 (2001-03-01), Agarwal et al.
patent: 6206769 (2001-03-01), Walker
patent: 6208425 (2001-03-01), Sandhu et al.
patent: 6210257 (2001-04-01), Carlson
patent: 6213845 (2001-04-01), Elledge
patent: 62
Micro)n Technology, Inc.
Perkins Coie LLP
Rosenberger Richard A.
LandOfFree
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