Planarizing coating method

Details Planarizing coating method Planarizing coating method

2011-07-05

2011-07-05

Jolley, Kirsten C (Department: 1715)

Coating processes

Centrifugal force utilized

C427S261000, C427S265000, C427S407100, C427S419300, C427S425000, C438S758000

Reexamination Certificate

active

07972654

ABSTRACT:
A planarizing coating method for filling a step between patterns formed on a board surface, includes the steps of: preparing at least two types of coating liquids different in non-volatile matter densities, first coating one of the coating liquids higher in density on the board surface, rotating the board so as to leave the one coating liquid inside the step and such that, at the same time, substantially none of the one coating liquid is left on a pattern crest of the patterns, subsequently coating another of the coating liquids lower in non-volatile matter density on the board surface, and rotating the board so that the coating liquid lower in density is left on a coating film comprising the one coating liquid higher in density and such that, at the same time, substantially none of the other coating liquid lower in density left on the pattern crest.

REFERENCES:
patent: 4576834 (1986-03-01), Sobczak
patent: 6214104 (2001-04-01), Iida et al.
patent: 2005/0170093 (2005-08-01), Chung et al.
patent: 2003-230860 (2003-08-01), None

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