Planarizing antireflective coating compositions

Details Planarizing antireflective coating compositions Planarizing antireflective coating compositions

2005-02-15

2005-02-15

Huff, Mark F. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaged product

Multilayer

C430S009000, C430S018000, C430S290000, C430S950000

Reexamination Certificate

active

06855466

ABSTRACT:
The present invention provides new light absorbing compositions suitable for use as antireflective coating compositions (“ARCs”), including for deep UV applications. The antireflective compositions of the invention are particularly useful where a planarizing coating layer is required. ARCs of the invention contain a low molecular weight resin, a plasticizer compound and/or a low Tg resin. The invention also includes methods for applying forming planarizing ARC coating layers.

REFERENCES:
patent: 4060656 (1977-11-01), Naka et al.
patent: 4362809 (1982-12-01), Chen et al.
patent: 4370405 (1983-01-01), O'Toole et al.
patent: 4621042 (1986-11-01), Pampalone et al.
patent: 4668606 (1987-05-01), DoMinh et al.
patent: 4910122 (1990-03-01), Arnold et al.
patent: 5234990 (1993-08-01), Flaim et al.
patent: 5368989 (1994-11-01), Flaim et al.
patent: 5498748 (1996-03-01), Urano et al.
patent: 5541037 (1996-07-01), Hatakeyama et al.
patent: 5554485 (1996-09-01), Dichiara et al.
patent: 5597868 (1997-01-01), Kunz
patent: 5607824 (1997-03-01), Fahey et al.
patent: 5624789 (1997-04-01), Rahman et al.
patent: 5652297 (1997-07-01), McCulloch et al.
patent: 5652317 (1997-07-01), McCulloch et al.
patent: 5693691 (1997-12-01), Flaim et al.
patent: 5733714 (1998-03-01), McCulloch et al.
patent: 5736301 (1998-04-01), Fahey et al.
patent: 5741626 (1998-04-01), Hain et al.
patent: 5744293 (1998-04-01), Okumura et al.
patent: 5783361 (1998-07-01), Conley et al.
patent: 5851730 (1998-12-01), Thackeray et al.
patent: 5858627 (1999-01-01), Rahman et al.
patent: 5886102 (1999-03-01), Sinta et al.
patent: 5919599 (1999-07-01), Meador et al.
patent: 5935760 (1999-08-01), Shao et al.
patent: 6033830 (2000-03-01), Sinta et al.
patent: 6106995 (2000-08-01), Dixit et al.
patent: 6114085 (2000-09-01), Padmanaban et al.
patent: 6268108 (2001-07-01), Iguchi et al.
patent: 6339112 (2002-01-01), Kauffman et al.
patent: 6391786 (2002-05-01), Hung et al.
patent: 6410209 (2002-06-01), Adams et al.
patent: 6468718 (2002-10-01), Kang et al.
patent: 20020022196 (2002-02-01), Pavelchek et al.
patent: 20020031729 (2002-03-01), Trefonas et al.
patent: 0 542 008 (1993-05-01), None
patent: 0 861 855 (1998-09-01), None
patent: 0 987 600 (2000-03-01), None
patent: 0 989 463 (2000-03-01), None
patent: WO 9003598 (1990-04-01), None
patent: WO 99 21058 (1999-04-01), None

Affiliated with

Also associated with

Rating

Planarizing antireflective coating compositions does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Planarizing antireflective coating compositions, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Planarizing antireflective coating compositions will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3464340