Planarized perpendicular pole tip system and method for...

Dynamic magnetic information storage or retrieval – Head – Core

Reexamination Certificate

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Reexamination Certificate

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10798163

ABSTRACT:
A method for manufacturing a pole tip structure for a magnetic head is provided. An etch stop layer is initially deposited after which a transfer layer is deposited. Further deposited is at least one masking layer. Reactive ion etching is then performed to define a trench in at least the transfer layer. A pole tip layer is then deposited in the trench to define a pole tip structure flanked at least in part by the transfer layer. A surface of the transfer layer or etch stop layer then remains in co-planar relationship with a surface of the pole tip structure.

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Hsiao, R., “Fabrication of Magnetic Recording Heads and Dry Etching of Head Materials,” IBM Journal of Research and Development, vol. 43, ½, 1999.

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