Planarization technique

Details Planarization technique Planarization technique

1983-01-17

1984-01-24

Newsome, John H.

Coating processes

Electrical product produced

Welding electrode

427 96, 427375, 4273855, 430192, 430330, 430331, B05D 306

Patent

active

044277130

ABSTRACT:
A method of planarizing a light sensitive coating on a substrate having topographical features is provided. The coating which comprises a novolak resin and a diazoquinone sensitizer is exposed to actinic radiation to react substantially all of the sensitizer and then heated by applying heat to the surface of the substrate opposite the coating.

REFERENCES:
patent: 3873313 (1975-03-01), Horst et al.
patent: 3971316 (1976-07-01), Schank et al.
patent: 3976524 (1976-08-01), Feng
patent: 4004044 (1977-01-01), Franco et al.
patent: 4015986 (1977-04-01), Paal et al.
patent: 4171979 (1979-10-01), Novak et al.
patent: 4315985 (1982-02-01), Castellani et al.
Adams et al. J. Electrochem. Soc., vol. 128, No. 2, 423 (1981).

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