Planarization methods for patterned media disks

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S603130, C029S603160, C427S128000, C427S129000, C451S008000, C451S041000, C451S063000

Reexamination Certificate

active

07941911

ABSTRACT:
A method is provided for forming a plurality of regions of magnetic material in a substrate having a first approximately planar surface. The method comprises the steps of fabricating projections in the first surface of the substrate, depositing onto the first surface a magnetic material in such a way that the tops of the projections are covered with magnetic material, and depositing filler material atop the substrate so produced. The filler material may then be planarized, for example by chemical-mechanical polishing. In an alternative embodiment magnetic material is deposited on a substrate and portions of it are removed, leaving islands of material. Filler material is then deposited, which may be planarized.

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