Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2005-01-11
2005-01-11
Nguyen, Vinh P. (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
Reexamination Certificate
active
06841991
ABSTRACT:
Maintaining proper planarity of elements of a microelectronic component test system helps ensure reliable operation of the test system. This disclosure suggests test systems and methods for verifying planarity of, for example, a head and a support surface of a microelectronic component test system. In one exemplary method, a probe card is mounted to and electrically coupled to a head of a microelectronic component test system. The probe card has an array of probes. A contact surface of the support is moved with respect to the head and a change in contact condition of each of the probes is recorded in a first data set. The orientation of the probe card with respect to the contact surface is changed, the contact surface is moved with respect to the head again, and a change in contact condition of each of the probes is recorded in a second data set.
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Crump Brett
Martin Michael H.
Micro)n Technology, Inc.
Nguyen Vinh P.
Perkins Coie LLP
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