Planar waveguides

Details Planar waveguides Planar waveguides

1997-04-23

1999-05-18

Dutton, Brian

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

385131, 385132, 385144, H01L21/00

Patent

active

059044918

ABSTRACT:
A cladding layer on the core of an optical waveguide is subjected to a rapid thermal annealing process preferably either: in a multi-stage furnace in which the waveguide substrate can be transported rapidly on a carriage between stages at different temperatures; or in a quartz chamber adjacent a bank of quartz halogen lamps of low thermal inertia and easily switched rapidly between different intensities of thermal radiation through the chamber.

REFERENCES:
patent: 5243677 (1993-09-01), Kanamori et al.
patent: 5408569 (1995-04-01), Nishimoto
patent: 5519803 (1996-05-01), Shiono et al.
patent: 5653008 (1997-08-01), Sim et al.

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