Planar-type microwave integrated circuit with at least one mesa

Details Planar-type microwave integrated circuit with at least one mesa Planar-type microwave integrated circuit with at least one mesa

1990-10-23

1992-04-07

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437904, H01L 2176

Patent

active

051028220

ABSTRACT:
A microwave integrated circuit having planar and mesa components and microstrip lines and method of making the same is disclosed. To preserve a constant impedance for the microstrip lines, the mesa component is buried in a recess, which is then filled with a dielectric having substantially the same thermal expansion coefficient and the same dielectric constant as the insulating substrate. The surface of the mesa component and of the dielectric is in the plane of the planar part of the integrated circuit. Between the interconnecting microstrip lines on the planar face and the ground plane on the face of the substrate, the thickness and the dielectric constant of the material is constant.

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