Planar type frequency shift probe for measuring plasma...

Electricity: measuring and testing – Using ionization effects – For analysis of gas – vapor – or particles of matter

Reexamination Certificate

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Reexamination Certificate

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08040138

ABSTRACT:
A planar type frequency shift probe that utilizes resonance of electromagnetic waves and includes a main body with a conductor plate and a coaxial cable. The main body includes a long narrow space, which has predetermined width and length and has an opening on the periphery of the main body, as well as the first surface part and the second surface part. The surface conductor of the coaxial cable is connected to the first surface part while the core conductor of the coaxial cable is connected to the second surface part via a lead wire.

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R.B Piejak et al: “The Hairpin Resonator: A Plasma Density Measuring Techniques Revisited”, Journal of Applied Physics, vol. 95, No. 7,1, pp. 3785-3791, 2004.
R.L. Stenzel: “Microwave Resonator Probe for Localized Density Measurements in Weakly Magnetized Plasmas,” Rev. Sci. Instrum., vol. 47, No. 5 pp. 603-607, 1976.

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