Planar silicon-on-sapphire composite

Stock material or miscellaneous articles – Structurally defined web or sheet – Discontinuous or differential coating – impregnation or bond

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Details

357 60, 357 61, 428446, 428538, 428539, B01J 1700, H01L 2300

Patent

active

041339258

ABSTRACT:
A semi-planar silicon-on-sapphire composite comprises a sapphire substrate, an epitaxial monocrystalline silicon mesa formed adjacent the substrate and an epitaxial deposition of monocrystalline aluminum oxide surrounding the mesa.

REFERENCES:
patent: 3425879 (1969-02-01), Shaw et al.
patent: 3661676 (1972-05-01), Wong
patent: 3728153 (1973-04-01), Heinz
patent: 3740280 (1973-06-01), Ronen
patent: 3764413 (1973-10-01), Kakizaki
patent: 3766637 (1973-10-01), Norris et al.
patent: 3928092 (1975-12-01), Bellany et al.

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