Planar semiconductor three direction acceleration detecting devi

Details Planar semiconductor three direction acceleration detecting devi Planar semiconductor three direction acceleration detecting devi

1980-12-24

1982-08-03

Gill, James J.

Measuring and testing

Speed, velocity, or acceleration

Response to multiple sensing means or motion conditions

73517R, G01P 15125

Patent

active

043422276

ABSTRACT:
This device comprises a v-shaped cavity in a planar semiconductor substrate having a substantially thin-walled v-shaped cantilever beam inset therein. The beam is movable in directions normal to and laterally of the plane of the substrate, whereby acceleration is sensed in both of these directions. A planar substrate of n-type silicon is arranged with the major face oriented in the (100) plane. A v-shaped groove is anisotropically etched in the substrate and capacitor electrode regions are diffused into the sloping walls. An epitaxial layer is grown over this substrate, and over that a layer of insulation is added. A layer of conductive material is laid down on the insulation to define an electrode. The substrate is again subjected to an anisotropic etchant for cutting the epitaxial layer from under the cantilever beam formed of the insulating layer and the conducting layer. The electrodes form two variable capacitors which are connected in parallel or differentially to simple circuitry laid down on the same substrate for resolving the bidirectional movement of the beam. Three such devices appropriately oriented, and compatible electronic circuitry, enable all three spatial coordinates to be probed with a single substrate assembly.

REFERENCES:
patent: 3084558 (1963-04-01), Wilcox et al.
patent: 3229530 (1966-01-01), Wilcox et al.
patent: 3478604 (1969-11-01), Evans
patent: 3513711 (1970-05-01), Rogall et al.
patent: 3572109 (1971-03-01), Yerman
patent: 3877313 (1975-04-01), Ferriss
patent: 3911738 (1975-10-01), Fischer
patent: 4009607 (1977-03-01), Ficken
patent: 4071838 (1978-01-01), Block
patent: 4094199 (1978-06-01), Holdren et al.
patent: 4129042 (1978-12-01), Rosuold
patent: 4144516 (1979-03-01), Aine
Simon Middelhoek, James B. Angell & D. J. W. Noorlag "Microprocessors Get Integrated Sensors"; IEEE Spectrum; 2-80 pp. 42-45 at p. 44 Col. 2, and Figs. [3] and [4] on p. 45.
J. J. Fatula Jr., P. L. Garbarino & P. J. Tsang; "Acoustical Spectrum Analyzer on a Chip;" IBM TDB, vol. 22 No. 11, Apr. 1980; p. 4906 and pp. 4907-4908.

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