Planar segmented contact

Details Planar segmented contact Planar segmented contact

2008-03-25

2009-08-25

Pham, Thanh V (Department: 2894)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S102000, C438S128000, C438S637000, C257SE31029, C257SE29296

Reexamination Certificate

active

07579210

ABSTRACT:
An electronic device including a planar segmented contact. A method for forming the device includes depositing a first insulator on a substrate, forming an opening in the first insulator, disposing a conductive material in the opening where the conductive material defines two or more conductive regions, forming a second insulator over the conductive layer, removing a portion of the second insulator to expose less than all of the conductive regions, recessing at least one of the exposed conductive regions, forming a third insulator over the recessed conductive region, and planarizing to expose at least one of the non-recessed conductive regions without exposing a recessed conductive region. An electrically stimulable material may then be formed over an exposed non-recessed conductive region.

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patent: 2008/0220560 (2008-09-01), Klersy

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