Planar pn-junction of high electric strength

Details Planar pn-junction of high electric strength Planar pn-junction of high electric strength

1991-05-06

1992-05-12

James, Andrew J.

357 13, 357 20, 357 34, 357 38, 357 52, 357 65, H01L 2940

Patent

active

051132370

ABSTRACT:
A planar pn-junction with high electric strength, which separates a semiconductor region inserted in a semiconductor body from the rest of the semiconductor body, has, in its border region, a plurality of field plates which are separated from a semiconductor zone residing below and extending the semiconductor region by an electrically insulating layer. The field plates contact the semiconductor zone in the area of contact holes. The contact holes respectively have set distances between them and the inner and outer field plate edges, whereby below those field plate parts residing between the contact holes and the inner field plates borders, local doping maxima of the semiconductor zone are provided.

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