Machine element or mechanism – Control lever and linkage systems – Multiple controlling elements for single controlled element
Reexamination Certificate
1999-10-06
2001-12-04
Gutierrez, Diego (Department: 2859)
Machine element or mechanism
Control lever and linkage systems
Multiple controlling elements for single controlled element
C074S47100R, C318S630000, C318S632000, C318S640000, C033S0010MP
Reexamination Certificate
active
06324933
ABSTRACT:
BACKGROUND OF THE INVENTION
This invention relates to stages for precision movement and location, such as used in precision machines including semiconductor projection lithography equipment and, more particularly, to improved apparatus for moving a stage platform in X and Y directions.
Positioners for moving a workpiece in a projection lithography apparatus are well known. When the lithography is effected by means of an electron beam, the workpiece, and its associated platform, must be maintained in a vacuum. If the platform positioner motors are also maintained in the vacuum, this presents a problem in cooling the motors. Accordingly, it would be desirable to have the motors located in “air” while the platform being moved is located in a vacuum.
To provide smooth movement of the platform, it would be desirable to be able to use air bearings for all the moving parts. Therefore, some means must be provided for isolating the air bearings from the vacuum holding the workpiece platform.
It would also be desirable to minimize the space required for the platform positioner by having the platform and the positioner lying substantially in a plane.
SUMMARY OF THE INVENTION
According to the present invention there is provided apparatus for moving a platform in X and Y directions. The inventive apparatus comprises a first shaft secured to a first edge of the platform and oriented axially in the X direction and a second shaft secured to a second edge of the platform and oriented axially in the Y direction. First and second bearings support the first and second shafts, respectively, for axial movement. A first linear drive shaft is oriented axially in the Y direction and has a first end secured to the first bearing and a second linear drive shaft is oriented axially in the X direction and has a first end secured to the second bearing. The first and second drive shafts are arranged for independent axial movement in the Y and X directions, respectively, and the first and second shafts and first and second drive shafts lie substantially in a single plane.
In accordance with an aspect of this invention, the first bearing is an air bearing and the inventive apparatus further comprises a further air bearing supporting the first drive shaft for axial movement and a conduit coupling the further air bearing to the first bearing.
In accordance with another aspect of this invention, the conduit includes a passageway within the first drive shaft having a first end opening to the periphery of the first drive shaft within the further air bearing and a second end opening to the periphery of the first drive shaft between the further air bearing and the first end of the first drive shaft.
In accordance with a further aspect of this invention, the platform includes a substantially rectangular planar block to which the first and second shafts are secured. The apparatus further comprises a first plate on a first side of the block, a second plate parallel to the first plate on a second side of the block, and a plurality of planar air bearing pads installed in each of the first and second plates. The planar air bearing pads in one of the first and second plates provide a preload to the block.
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Waskiewicz Warren K.
Werder Kurt S.
Agere Systems Guardian Corp.
Davis David L.
Gutierrez Diego
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