Electricity: motive power systems – Positional servo systems
Reexamination Certificate
2007-04-17
2007-04-17
Duda, Rina (Department: 2837)
Electricity: motive power systems
Positional servo systems
C318S640000, C318S649000, C414S935000
Reexamination Certificate
active
10874691
ABSTRACT:
A planar motor is controlled by supplying a three-phase alternating current to a coil assembly. Each phase is supplied to one of three coils. The coils are positioned in a magnetic field generated by a magnet plate having alternating magnet poles at its surface for generating an alternating magnetic field. In operation, the phase of each current flowing through each coil determines the direction of a force generated due to the current in the magnetic field. For correct operation, the phase angle of each current is to be adapted to the local direction of the magnetic field by determining a commutation-offset angle. The commutation-offset angle is determined by generating a force in an unknown direction and varying the commutation-angle, and determining when the generated force is directed perpendicular to the magnet plate, while ensuring that the generated force does not exceed a horizontal friction force. By determining a maximum compression of end stops of the coil assembly, or determining a maximum pressure, it may be determined when the generated force is directed perpendicular to the magnet plate.
REFERENCES:
patent: 6373153 (2002-04-01), Hazelton et al.
patent: 6580260 (2003-06-01), Takita
patent: 6969966 (2005-11-01), Ebihara et al.
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Cox Henrikus Herman Marie
Hol Sven Antoin Johan
Simons Wilhelmus Franciscus Johannes
ASML Netherlands B.V.
Duda Rina
Pillsbury Winthrop Shaw & Pittman LLP
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