Planar lightwave circuit variable optical attenuator

Optical waveguides – Temporal optical modulation within an optical waveguide – Electro-optic

Reexamination Certificate

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Details

C385S001000, C385S003000, C385S039000, C385S040000, C359S237000, C359S238000, C359S240000, C359S288000

Reexamination Certificate

active

11015223

ABSTRACT:
The invention relates to a variable optical attenuator constructed as a Mach Zehnder planar lightwave circuit, particularly including a channel waveguide support structure for heat isolation and stress relief to reduce polarization dependent loss (PDL) and power consumption in the device. Power reduction trenches comprise longitudinal segments having small stress relief pillars of cladding material left in between them in the etching process. The waveguides of the MZI are supported by a main pillar structure and integral stress relief pillars which remain after removal of the trenches. The waveguide is surrounded by air on three sides for improved heat isolation. The performance of the present invention shows substantial improvement in PDL and extinction ratio over the prior art continuous trench design, and also, to a smaller degree, over the case where power reduction trenches are not used at all. Segmented trenches appear to allow for the lowest stress on the two waveguide arms of all the cases including no trench and trenched devices.

REFERENCES:
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patent: 6704487 (2004-03-01), Parhami et al.
patent: 2002/0126933 (2002-09-01), Goh et al.
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PLC type compact variable optical attenuator for photonic transport network, by Kawai et al., Electronic Letters, vol. 34, No. 3, pp. 264-265, Feb. 5, 1998.
Low-Power Compact 2×2 Thermooptic Silica-on-Silicon Waveguide Switch with Fast Response, by Lai et al, IEEE Photonics Technology Letters, vol. 10, No. 5, pp. 681-683, May 1998.
Feedback controlled variable optical attenuator for channel power regulation in WDM systems, by Jin et al., Electronic Letters, vol. 35, No. 11, pp. 916-917, May 27, 1999.
Low-Power Consumption Silica-Based 2×2 Thermooptic Switch Using Trenched Silicon Substrate, by Kasahara et al., IEEE Photonics Technology Letters, vol. 11, No. 9, pp. 1132-1134, Sep. 1999.
New Structure of Silica-Based Planar Lighwave Circuits for Low-Power Thermooptic Switch and its Application to 8×8 Optical Matrix Switch, by Kasahara et al., Journal of Lightwave Technology, vol. 20, No. 6, pp. 993-999, Jun. 2002.

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