Planar heater

Details Planar heater Planar heater

2008-11-13

2011-12-06

Paik, Sang (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S444100, C219S541000

Reexamination Certificate

active

08071920

ABSTRACT:
A planar heater1in which a power supply terminal unit108which supplies an electric power is arranged on a central portion on a lower surface of a silica glass plate-like member102. The power supply terminal unit includes small-diameter silica glass tubes105aand106a, which contain a connection line which supplies an electric power to a carbon heat generator and a large-diameter silica glass tube2which contains the small-diameter silica glass tubes105aand106a. A flange portion2ais formed on a lower end of the large-diameter silica glass tube2, and a bent portion2bhaving different diameters is formed between an upper end of the large-diameter silica glass and the flange portion2a, and the first heat shielding plates19, 20and21configured by metal plates or opaque silica glass plates are contained in the large-diameter silica glass tube below the bent portion.

REFERENCES:
patent: 5462603 (1995-10-01), Murakami
patent: 5478429 (1995-12-01), Komino et al.
patent: 6066836 (2000-05-01), Chen et al.
patent: 6204488 (2001-03-01), Toya et al.
patent: 6407371 (2002-06-01), Toya et al.
patent: 6584279 (2003-06-01), Seko et al.
patent: 6885814 (2005-04-01), Saito et al.
patent: 2007-220595 (2007-08-01), None

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