Stock material or miscellaneous articles – Composite – Of inorganic material
Patent
1991-09-23
1994-07-19
Turner, A. A.
Stock material or miscellaneous articles
Composite
Of inorganic material
73 3106, 428216, 428336, 428469, 428472, 428702, B32B 702
Patent
active
053308557
ABSTRACT:
A planar epitaxial film of tin oxide has low defect density, high purity, crystalline rutile unit cell structure, one crystalline orientation, controlled stoichiometry, extended lateral dimensions, extremely smooth surface morphology, a high degree of atomic order extending to the surface of the film and is colorless and transparent. The film is made by a method which includes reactive sputter deposition. The films can be used in chemical sensors as well as in numerous other applications.
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Cavicchi Richard E.
Semancik Stephen
The United States of America as represented by the Secretary of
Turner A. A.
Wasserman Fran S.
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