Planar 3-axis inertial measurement unit

Details Planar 3-axis inertial measurement unit Planar 3-axis inertial measurement unit

2007-01-30

2007-01-30

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120

Reexamination Certificate

active

11375034

ABSTRACT:
The present invention relates to a z-axial solid-state gyroscope. Its main configuration is manufactured with a conductive material and includes two sets of a proof mass and two driver bodies suspended between two plates by an elastic beam assembly. Both surfaces of the driver bodies and the proof masses respectively include a number of grooves respectively perpendicular to a first axis and a second axis. The surfaces of the driver bodies and the proof masses and the corresponding stripe electrodes of the plates thereof are respectively formed a driving capacitors and a sensing capacitors. The driving capacitor drives the proof masses to vibrate in the opposite direction along the first axis. If a z-axial angular velocity input, a Coriolis force makes the two masses vibrate in the opposite direction along the second axis. If a first axial acceleration input, a specific force makes the two masses move in the same direction along the first axis. If a second axial acceleration input, a specific force makes the two masses move in the same direction along the second axis. Both inertial forces make the sensing capacitances change. One z-axial solid-state gyroscopes and two in-plane axial gyroscopes can be designed on a single chip to form a complete three-axis inertial measurement unit.

REFERENCES:
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patent: 5753817 (1998-05-01), Park et al.
patent: 6041653 (2000-03-01), Ichikawa et al.
patent: 6928873 (2005-08-01), Chen et al.
Xie, Huikai,Gyroscope and Micromirror Design Using Vertical-Axis CMOS-MEMS Actuation and Sensing, PHD Thesis, Carnegie Mellon University, May, 2002, Fig. 6-38, p. 194. Copy at http://www.ece.cmu.edu/˜mems/pubs/pdfs/ece/phd—thesis/0123—xie-2002.pdf.

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