Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor
Reexamination Certificate
2006-03-17
2008-10-28
Lindsay, Jr., Walter L (Department: 2812)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
C438S015000, C438S106000, C257SE21499, C257SE23001, C257SE33056
Reexamination Certificate
active
07442576
ABSTRACT:
A semiconductor device is provided that includes a hermetically sealed housing having a top member and a bottom member. A semiconductor die is enclosed within the housing and absorbing material is positioned under the semiconductor die.
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Chip-Level Vacuum Packaging of Micromachines Using NanoGetters; by D. Sparks, S. Massoud-Ansari, N. Najafi, IEEE Transactions on Advanced Packaging, vol. 26, #3, Aug. 2003.
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Chen Chien-Hua
Crald David M.
Schwinabart Troy D.
Lindsay, Jr. Walter L
Mustapha Abdulfattah
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