Pixellated device with the metal layer atop the address lines

Details Pixellated device with the metal layer atop the address lines Pixellated device with the metal layer atop the address lines

2007-03-06

2007-03-06

Schechter, Andrew (Department: 2871)

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

C349S187000, C349S043000, C349S147000, C349S148000

Reexamination Certificate

active

10853349

ABSTRACT:
A method for use in the fabrication of active plates for pixellated devices, such as active matrix liquid crystal displays, having pixel electrodes (38) and associated address lines (32) formed from a layer of transparent conductive material (53) through which the conductivity of the address lines is improved. The transparent conductive layer (53) and a metal layer (54) are deposited in succession and followed by a shielding layer (60), e.g. of photoresist, which is patterned into a configuration of regions (67,68,69) corresponding to the required pixel dielectrodes and address lines with a property of the layer at these respective regions being different. This enables the regions of this layer corresponding to the pixel electrodes to be selectively etched away, thereby allowing the metal at these regions to be selectively removed while leaving metal at the address lines.The method simplifies the production of low mask mount TFT active plates with improved address line conductivity.

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“A TFT manufactured by 4 masks process with new photolithography”, C.W. Han et al, SID Proceedings of the 18thInternational Display Research Conference, pp. 1109-1112.
“A Novel Four Mask-Count Process Architecture for TFT-LCDs”, C.W. Kim et al, SID 00 Digest, pp. 1006-1009.

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