Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2007-06-12
2007-06-12
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
C356S521000
Reexamination Certificate
active
10838694
ABSTRACT:
A phase-difference sensor measures the spatially resolved difference in phase between orthogonally polarized reference and test wavefronts. The sensor is constructed as a pixelated phase-mask aligned to and imaged on a pixelated detector array. Each adjacent pixel of the phase-mask measures a predetermined relative phase shift between the orthogonally polarized reference and test beams. Thus, multiple phase-shifted interferograms can be synthesized at the same time by combining pixels with identical phase-shifts. The multiple phase-shifted interferograms can be combined to calculate standard parameters such as modulation index or average phase step. Any configuration of interferometer that produces orthogonally polarized reference and object beams may be combined with the phase-difference sensor of the invention to provide, single-shot, simultaneous phase-shifting measurements.
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Brock Neal J.
Hayes John B.
Millerd James E.
Wyant James C.
4D Technology Corporation
Connolly Patrick J
Durando Antonio R.
Toatley , Jr. Gregory J.
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