Pixel structure, and thin film transistor

Active solid-state devices (e.g. – transistors – solid-state diode – Non-single crystal – or recrystallized – semiconductor... – Amorphous semiconductor material

Reexamination Certificate

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Details

C257SE27131, C438S155000, C438S159000

Reexamination Certificate

active

10907490

ABSTRACT:
A method of fabricating a pixel structure is disclosed. A substrate having a color filter layer thereon and a leveling layer further covers the color filter layer is provided. A first metal layer is formed over the leveling layer. The first metal layer is patterned to define a source/drain. A channel material layer, a gate insulating layer and a second metal layer are formed over the substrate to cover the source/drain. The second metal layer, the gate insulating layer and the channel material layer are patterned to define a gate and a channel layer. A passivation layer is formed over the substrate to cover the gate. The passivation layer is patterned to expose a portion of the drain. A transparent conductive layer is formed over the substrate, and is electrically connected to the exposed drain. Thereafter, the transparent conductive layer is patterned to form a pixel electrode.

REFERENCES:
patent: 5517341 (1996-05-01), Kim et al.
patent: 5517342 (1996-05-01), Kim et al.
patent: 5767926 (1998-06-01), Kim et al.
patent: 5946058 (1999-08-01), Kamada et al.
patent: 5995175 (1999-11-01), Kim et al.
patent: 2001/0040645 (2001-11-01), Yamazaki
patent: 2004/0061141 (2004-04-01), Kondoh

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