Abrading – Work holder – Clamp
Patent
1997-02-06
1998-11-03
Eley, Timothy V.
Abrading
Work holder
Clamp
451404, 451405, 269 73, B24B 4106, B23Q 125
Patent
active
058300481
ABSTRACT:
A tool and method for holding an integrated circuit (IC) sample so that only a cross-section of the processed layers of the sample is polished and exposed. The tool includes (a) a mounting block with a recess, (b) a pivoting member pivotably attached in the recess so as to be pivotable between a first position at which an edge of the sample can be ground at a first angle of approximately 25.degree. and a second position at which the sample can be polished at a second angle of approximately 0.degree. to expose the cross-section of the processed layer without polishing the more resistant substrate, (c) a sample holder removably attached to the pivoting member with a face inclined at the first angle for attachment of the sample, and (d) a level corrector for adjusting a side-to-side tilt of the mounting block.
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Eley Timothy V.
Harris Corporation
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