Pirani vacuum gauge

Details Pirani vacuum gauge Pirani vacuum gauge

2011-04-05

2011-04-05

Patel, Harshad (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C324S460000, C702S138000

Reexamination Certificate

active

07918139

ABSTRACT:
A Pirani vacuum gauge in which a response to a rapid pressure rise is improved and restrictions on a mounting direction of a container on a chamber to be measured for pressure are eliminated is provided. The Pirani vacuum gauge includes a heat filament of metal wire and a support unit for supporting the heat filament in a container, wherein a gas pressure is measured based on an amount of heat conducted away from the heat filament by gas molecules colliding with the heat filament, characterized in that a body of the container is filled with metal material, but a first cylindrical bore and a second cylindrical bore extend through the body, the heat filament being inserted into the first cylindrical bore and the support unit being inserted into the second cylindrical bore.

REFERENCES:
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patent: 4995264 (1991-02-01), Stocker et al.
patent: 5475623 (1995-12-01), Stocker
patent: 6619131 (2003-09-01), Walchli et al.
patent: 2008/0115585 (2008-05-01), Miyashita et al.
patent: 48-041093 (1973-12-01), None
patent: 6-066662 (1994-03-01), None
patent: 6-160226 (1994-06-01), None
patent: 3188752 (2001-05-01), None
patent: WO 2006/057148 (2006-06-01), None

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