Pirani pressure sensor

Details Pirani pressure sensor Pirani pressure sensor

1995-02-07

1997-05-27

Dougherty, Elizabeth L.

Measuring and testing

Fluid pressure gauge

Electrical

427101, G01L 2112

Patent

active

056334656

ABSTRACT:
The invention is a method and apparatus for a pirani pressure sensor. The apparatus consists of a current supply and current receiving means affixed to a substrate. Bridging the current supply means and current receiving means is an electrically conductive polymer. The pirani pressure sensor may be made using conventional photolithographic techniques.

REFERENCES:
patent: 4048349 (1977-09-01), White et al.
patent: 4682503 (1987-07-01), Higashi et al.
patent: 5262195 (1993-11-01), Moss et al.
patent: 5347869 (1994-09-01), Shie et al.

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