Pipe washing method and pipe washing apparatus

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment

Reexamination Certificate

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Details

C134S022120, C134S102200, C134S16700R, C134S16800C, C166S312000

Reexamination Certificate

active

07017593

ABSTRACT:
A micro device in which a functional element can be moved between an operating position and a waiting position by the displacement of support means coupled to a substrate. The micro device has a cantilever structure in which one end of support means is made a fixed one fixed to the substrate and the other end to which an active element is provided is made a free end. A spring portion is provided to at least part of the support means, and thus the active element can be greatly displaced by a small stress.

REFERENCES:
patent: 5146988 (1992-09-01), Paul
patent: 5803101 (1998-09-01), Gallo
patent: 6027572 (2000-02-01), Labib et al.
patent: 6029746 (2000-02-01), Dodd
patent: 6142232 (2000-11-01), Troutt et al.
patent: 6170577 (2001-01-01), Noles et al.
patent: 6195585 (2001-02-01), Karunasiri et al.
patent: 3-2932 (1991-01-01), None
patent: 2558590 (1996-11-01), None

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