Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
Reexamination Certificate
2006-03-28
2006-03-28
Barr, Michael (Department: 1746)
Cleaning and liquid contact with solids
Processes
Hollow work, internal surface treatment
C134S022120, C134S102200, C134S16700R, C134S16800C, C166S312000
Reexamination Certificate
active
07017593
ABSTRACT:
A micro device in which a functional element can be moved between an operating position and a waiting position by the displacement of support means coupled to a substrate. The micro device has a cantilever structure in which one end of support means is made a fixed one fixed to the substrate and the other end to which an active element is provided is made a free end. A spring portion is provided to at least part of the support means, and thus the active element can be greatly displaced by a small stress.
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Barr Michael
Chaudhry Saeed
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