Image analysis – Applications – Manufacturing or product inspection
Patent
1994-02-02
1996-09-10
Mancuso, Joseph
Image analysis
Applications
Manufacturing or product inspection
348131, 356239, G06K 900, G01N 2100
Patent
active
055553150
ABSTRACT:
An inspection device and method that closely approximates a visual inspection technique for evaluating the quality of a sample. A mask image generation section generates a master image from an image signal of a known good sample. The image signal is used to a first mask image. A plurality of second mask images are generated by magnifying a pattern area of the first mask image by different magnification ratios. A discrimination surface area threshold is set for each mask image. An image under inspection generation section generates a binary image of an unknown sample. A discrimination section takes the logical AND of the binary images of the unknown sample and each mask image, calculates surface areas of pinhole flaws existing in a background area of the binary image under inspection, compares the calculated surface areas and the threshold corresponding to the mask images, and performs a pass/fail judgement of the unknown sample based on the result of this comparison.
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Del Rosso Gerard
Mancuso Joseph
Nippondenso Co. Ltd.
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