Drying and gas or vapor contact with solids – Apparatus – Chamber seals
Patent
1991-10-02
1992-10-27
Bennet, Henry A.
Drying and gas or vapor contact with solids
Apparatus
Chamber seals
34 16, F26B 2500
Patent
active
051578514
ABSTRACT:
A pinching gate valve for isolating the inside of a vacuum chamber equipped with a slot for passageway of a continuous substrate web therethrough. The pinching gate valve contains three components: a base plate having two inclined first sealing surfaces surrounding a substrate slot; a pair of mating jaws mounted for reciprocal movement toward and away from each other, each of said jaws including an inclined, second sealing surface for mating engagement with one of the first sealing surfaces, and a flat clamping surface for engagement with a surface of the substrate web; and means for reciprocating the jaws from a first, open position, to a second, clamping position.
REFERENCES:
patent: 4462332 (1984-07-01), Nath et al.
patent: 4480585 (1984-11-01), Gattuso
patent: 4545136 (1985-10-01), Izu et al.
patent: 4874631 (1989-10-01), Jacobson et al.
Bennet Henry A.
United Solar Systems Corporation
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