Batteries: thermoelectric and photoelectric – Photoelectric – Cells
Patent
1995-03-27
1997-10-14
Weisstuch, Aaron
Batteries: thermoelectric and photoelectric
Photoelectric
Cells
136249, 257 53, 257 55, 257 56, 257458, H01L 31075
Patent
active
056767650
ABSTRACT:
A photovoltaic element comprising a substrate and a multi-layered semiconductor active layer having a pin junction structure disposed on said substrate, said multi-layered semiconductor layer comprising a non-single crystal semiconductor layer of n- or p-type, a non-single crystal i-type semiconductor layer and a non-single crystal semiconductor layer of p- or n-type being stacked in this order from the substrate side, characterized in that said i-type semiconductor layer comprises a three-layered structure comprising a non-single crystal layer (b) formed by means of a microwave plasma CVD process interposed between a pair of non-single crystal layers (a) and (c) each formed by means of a RF plasma CVD process, and said i-type layer (b) is a non-single crystal i-type layer formed by means of the microwave plasma process from a mixture of a silane series gas not containing chlorine atom(s), a chlorine-containing raw material gas in an amount of 10% or less of the total amount of the chlorine-free silane series gas and the chlorine-containing raw material gas, and hydrogen gas.
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Matsuda Koichi
Miyamoto Yusuke
Saito Keishi
Shimoda Hiroshi
Canon Kabushiki Kaisha
Weisstuch Aaron
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