Piezoresistor effects in semiconductor resistors

Details Piezoresistor effects in semiconductor resistors Piezoresistor effects in semiconductor resistors

1974-12-27

1976-06-22

Albritton, C. L.

Electrical resistors

Resistance value responsive to a condition

338 2, H01C 700

Patent

active

039654532

ABSTRACT:
In semiconductor integrated circuits, piezoresistance is recognized as a factor affecting production yield and circuit performance. Current flow in a circuit resistor is aligned with one of the <100> family of equivalent directions. When current is flowing along such a direction the change in resistance due to any combination of stress components is at a minimum. Additionally, variation of resistance due to stress and strain may be reduced by an increase of the total impurity concentration in a resistor.

REFERENCES:
patent: 3277698 (1966-10-01), Mason
patent: 3292128 (1966-12-01), Hall
patent: 3314035 (1967-04-01), Sanchez
patent: 3378648 (1968-04-01), Fenner
patent: 3456226 (1969-07-01), Vick

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