Piezoresistive transducers employing the spreading resistance ef

Details Piezoresistive transducers employing the spreading resistance ef Piezoresistive transducers employing the spreading resistance ef

1982-09-28

1984-04-24

Albritton, C. L.

Electrical resistors

Strain gauge type

Fluid- or gas pressure-actuated

73721, G01L 122

Patent

active

044451083

ABSTRACT:
There is disclosed a spreading resistance piezoresistive transducer which employs a planar diaphragm member fabricated from a semiconductor material and having deposited on a surface thereof at least three contact areas. A first contact area is located central to the diaphragm with a second area near the periphery of the diaphragm. A third contact is of a larger area and is positioned between the first and second contacts. A source of biasing potential is applied between the first and second contacts to cause current flow indicative of the spreading resistance between the contacts. The value of the spreading resistance varies in accordance with a force applied to the diaphragm.

REFERENCES:
patent: 3079576 (1963-02-01), Kooiman
patent: 3482197 (1969-12-01), Kondo et al.

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